EUV light source components and methods for producing, using and refurbishing same

A method is disclosed for in-situ monitoring of an EUV mirror to determine a degree of optical degradation. The method may comprise the steps/acts of irradiating at least a portion of the mirror with light having a wavelength outside the EUV spectrum, measuring at least a portion of the light after...

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Bibliographische Detailangaben

Hauptverfasser:	Bowering, Norbert R, Fomenkov, Igor V, Khodykin, Oleh V, Bykanov, Alexander N
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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