Device fabrication

Device fabrication is disclosed, including forming a first part of a device at a first fabrication facility as part of a front-end-of-the-line (FEOL) process, the first part of the device comprising a base wafer formed by FEOL processing, and subsequently performing one or more back-end-of-the-line...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Rinerson, Darrell, Cheung, Robin
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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