Charged particle beam system

A charged particle beam system wherein the output of the secondary electron detector is detected while the retarding voltage is varied between the values for which the secondary electrons do not reach the sample and the values for which the secondary electrons reach the sample, and the surface poten...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Komuro, Osamu, Nasu, Osamu
Format: Patent
Sprache:eng
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