Process for producing a concentrated solution for a photoresist-stripping liquid having low water content

There is provided a process for producing a concentrated solution of quaternary ammonium hydroxide which is characterized in that quaternary ammonium hydroxide in a form of water-containing crystals or of an aqueous solution is mixed with a water-soluble organic solvent selected from the group consi...

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Hauptverfasser:	Hirose, Katsutoshi, Koyama, Hiroya, Kamasaka, Kimihiro, Sasabe, Taro, Kai, Naoshi
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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