Process for producing a concentrated solution for a photoresist-stripping liquid having low water content

Process for producing a concentrated solution for a photoresist-stripping liquid having low water content

There is provided a process for producing a concentrated solution of quaternary ammonium hydroxide which is characterized in that quaternary ammonium hydroxide in a form of water-containing crystals or of an aqueous solution is mixed with a water-soluble organic solvent selected from the group consi...

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Hauptverfasser: Hirose, Katsutoshi, Koyama, Hiroya, Kamasaka, Kimihiro, Sasabe, Taro, Kai, Naoshi
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Sprache:eng
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creator Hirose, Katsutoshi
Koyama, Hiroya
Kamasaka, Kimihiro
Sasabe, Taro
Kai, Naoshi
description There is provided a process for producing a concentrated solution of quaternary ammonium hydroxide which is characterized in that quaternary ammonium hydroxide in a form of water-containing crystals or of an aqueous solution is mixed with a water-soluble organic solvent selected from the group consisting of glycol ether, glycol and triol and the resulting mixed solution is subjected to a thin-film distillation in vacuo so as to evaporate the low boiling material. In accordance with this process, a concentrated solution of quaternary ammonium hydroxide having low water content is able to be easily produced.
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title Process for producing a concentrated solution for a photoresist-stripping liquid having low water content
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