Method and system for adjusting beam dimension for high-gradient location specific processing

A method and system of location specific processing on a substrate is described. The method comprises establishing a gas cluster ion beam (GCIB) according to a set of beam properties and measuring metrology data for a substrate. Thereafter, the method comprises determining at least one spatial gradi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MacCrimmon, Ruairidh, Hofmeester, Nicolaus J, Caliendo, Steven P
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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