Reprogrammable fuse structure and method

Reprogrammable fuse structure and method

A reversible fuse structure in an integrated circuit is obtained through the implementation of a fuse cell having a short thin line of phase change materials in contact with via and line structures capable of passing current through the line of phase change material (fuse cell). The current is passe...

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Hauptverfasser: Burr, Geoffrey W, Kothandaraman, Chandrasekharan, Lam, Chung Hon, Liu, Xiao Hu, Rossnagel, Stephen M, Tyberg, Christy S, Wisnieff, Robert L
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creator Burr, Geoffrey W
Kothandaraman, Chandrasekharan
Lam, Chung Hon
Liu, Xiao Hu
Rossnagel, Stephen M
Tyberg, Christy S
Wisnieff, Robert L
description A reversible fuse structure in an integrated circuit is obtained through the implementation of a fuse cell having a short thin line of phase change materials in contact with via and line structures capable of passing current through the line of phase change material (fuse cell). The current is passed through the fuse cell in order to change the material from a less resistive material to a more resistive material through heating the phase change material in the crystalline state to the melting point then quickly quenching the material into the amorphous state. The reversible programming is achieved by passing a lower current through the fuse cell to convert the high resistivity amorphous material to a lower resistivity crystalline material. Appropriate sense-circuitry is integrated to read the information stored in the fuses, wherein said sense circuitry is used to enable or disable circuitry.
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title Reprogrammable fuse structure and method
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