Method and apparatus for fluid processing a workpiece

A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member,...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Keigler, Arthur, Harrell, John, Liu, Zhenqiu, Wu, Qunwei
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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