Method for fabricating thin film transistors and array substrate including the same

The present invention relates to a method for fabricating thin film transistors (TFTs), which includes the following steps: forming a semi-conductive layer on a substrate; forming a patterned photoresist layer with a first thickness and a second thickness on the semi-conductive layer; pattering the...

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Bibliographische Detailangaben

Hauptverfasser:	Liao, Kuo Chu, Tsai, Shan Hung, Chen, Su Fen, Chung, Ming Yu
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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