Acceleration sensor

Acceleration sensor

A semiconductor device includes a semiconductor substrate and a semiconductor mass element configured to move in response to an applied acceleration. The mass element is defined by trenches etched into the semiconductor substrate and a cavity below the mass element. The semiconductor device includes...

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Hauptverfasser: Kautzsch, Thoralf, Winkler, Bernhard, Meinhold, Dirk, Rosam, Ben, Foeste, Bernd, Thamm, Andreas, Binder, Boris
Format: Patent
Sprache:eng
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creator Kautzsch, Thoralf
Winkler, Bernhard
Meinhold, Dirk
Rosam, Ben
Foeste, Bernd
Thamm, Andreas
Binder, Boris
description A semiconductor device includes a semiconductor substrate and a semiconductor mass element configured to move in response to an applied acceleration. The mass element is defined by trenches etched into the semiconductor substrate and a cavity below the mass element. The semiconductor device includes a sensing element configured to sense movement of the mass element and a complementary metal-oxide-semiconductor (CMOS) circuit formed on the substrate.
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title Acceleration sensor
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