Active pen nanolithography

Improved actuated probes suitable for scanning probe lithography or microscopy, and especially direct-write nanolithography and method of fabrication thereof. In one embodiment, thermomechanically actuated cantilevers with oxide-sharpened microcast tips are inexpensively fabricated by a process that...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shile, Raymond Roger, Duenas, Terrisa, Bussan, John Edward, Athas, Gregory J, Fragala, Joseph S, Haaheim, Jason R, Cruchon-Dupeyrat, Sylvain, Rendlen, Jeffrey R
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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