Nanopillar decoupling capacitor

Techniques for incorporating nanotechnology into decoupling capacitor designs are provided. In one aspect, a decoupling capacitor is provided. The decoupling capacitor comprises a first electrode; an intermediate layer adjacent to the first electrode having a plurality of nanochannels therein; a con...

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Bibliographische Detailangaben

Hauptverfasser:	Chakravarti, Satya N, Guo, Dechao, Bu, Huiming, Wong, Keith Kwong Hon
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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