Laser-based method and system for removing one or more target link structures

Laser-based methods and systems for removing one or more target link structures of a circuit fabricated on a substrate includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse havi...

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Bibliographische Detailangaben

Hauptverfasser:	Gu, Bo, Smart, Donald V, Cordingley, James J, Lee, Joohan, Svetkoff, Donald J, Johnson, Shepard D, Ehrmann, Jonathan S
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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