Method for producing a semiconductor wafer

2 A method for producing a semiconductor wafer. The method includes placing the semiconductor wafer in a cutout in a carrier. Both sides of the semiconductor wafer are polished between an upper and a lower polishing plate with a polishing agent until the thickness of the center of the semiconductor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Roettger, Klaus, Heier, Gerhard, Heilmaier, Alexander
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
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