System and method for wireless and dynamic intra-process measurement of integrated circuit parameters

System and method for wireless and dynamic intra-process measurement of integrated circuit parameters

Disclosed are embodiments of a system and a method that allow for wireless and dynamic intra-process (i.e., during and/or between process steps) measurements of integrated circuit parameters. The embodiments incorporate the use of a passive circuit, such as an inductor-capacitor-resistor (LCR) circu...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Anemikos, Theodoros E, Corson, Phillip L, Erturk, Mete, Hall, Ezra D. B, Perri, Anthony J, Ventrone, Sebastian T
Format: Patent
Sprache:eng
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Anemikos, Theodoros E
Corson, Phillip L
Erturk, Mete
Hall, Ezra D. B
Perri, Anthony J
Ventrone, Sebastian T
description Disclosed are embodiments of a system and a method that allow for wireless and dynamic intra-process (i.e., during and/or between process steps) measurements of integrated circuit parameters. The embodiments incorporate the use of a passive circuit, such as an inductor-capacitor-resistor (LCR) circuit resonator, that has a predetermined sensitivity to process variations in one or more physical or electrical integrated circuit parameters. The passive circuit can be wirelessly interrogated between and/or process steps. Then, the actual behavior exhibited by the passive circuit in response to the interrogation is compared to the expected behavior of an optimal circuit in the absence of process variations in order to determine the one or more parameters. Also disclosed is an embodiment of an exemplary passive circuit that can be used to implement the disclosed system and method embodiments.
format Patent
fullrecord <record><control><sourceid>uspatents_EFH</sourceid><recordid>TN_cdi_uspatents_grants_08239811</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>08239811</sourcerecordid><originalsourceid>FETCH-uspatents_grants_082398113</originalsourceid><addsrcrecordid>eNqNjEsKAjEQRGfjQtQ79AUGHGczrkVxr3tpko4GJh-6O8jc3kQ8gKuCevVq3dFtEaUAGC0E0ley4BLD2zPNJPLt7RIxeAM-KmOfOZlGAqEUpkBRIbkG6cmoZMF4NsUrZGSsn8Sy7VYOZ6HdLzcdXM7307UvkqsSVR7VbbGfDuNxGobxj8kHIgtA0w</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>System and method for wireless and dynamic intra-process measurement of integrated circuit parameters</title><source>USPTO Issued Patents</source><creator>Anemikos, Theodoros E ; Corson, Phillip L ; Erturk, Mete ; Hall, Ezra D. B ; Perri, Anthony J ; Ventrone, Sebastian T</creator><creatorcontrib>Anemikos, Theodoros E ; Corson, Phillip L ; Erturk, Mete ; Hall, Ezra D. B ; Perri, Anthony J ; Ventrone, Sebastian T ; International Business Machines Corporation</creatorcontrib><description>Disclosed are embodiments of a system and a method that allow for wireless and dynamic intra-process (i.e., during and/or between process steps) measurements of integrated circuit parameters. The embodiments incorporate the use of a passive circuit, such as an inductor-capacitor-resistor (LCR) circuit resonator, that has a predetermined sensitivity to process variations in one or more physical or electrical integrated circuit parameters. The passive circuit can be wirelessly interrogated between and/or process steps. Then, the actual behavior exhibited by the passive circuit in response to the interrogation is compared to the expected behavior of an optimal circuit in the absence of process variations in order to determine the one or more parameters. Also disclosed is an embodiment of an exemplary passive circuit that can be used to implement the disclosed system and method embodiments.</description><language>eng</language><creationdate>2012</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8239811$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,309,781,803,886,64043</link.rule.ids><linktorsrc>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/8239811$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Anemikos, Theodoros E</creatorcontrib><creatorcontrib>Corson, Phillip L</creatorcontrib><creatorcontrib>Erturk, Mete</creatorcontrib><creatorcontrib>Hall, Ezra D. B</creatorcontrib><creatorcontrib>Perri, Anthony J</creatorcontrib><creatorcontrib>Ventrone, Sebastian T</creatorcontrib><creatorcontrib>International Business Machines Corporation</creatorcontrib><title>System and method for wireless and dynamic intra-process measurement of integrated circuit parameters</title><description>Disclosed are embodiments of a system and a method that allow for wireless and dynamic intra-process (i.e., during and/or between process steps) measurements of integrated circuit parameters. The embodiments incorporate the use of a passive circuit, such as an inductor-capacitor-resistor (LCR) circuit resonator, that has a predetermined sensitivity to process variations in one or more physical or electrical integrated circuit parameters. The passive circuit can be wirelessly interrogated between and/or process steps. Then, the actual behavior exhibited by the passive circuit in response to the interrogation is compared to the expected behavior of an optimal circuit in the absence of process variations in order to determine the one or more parameters. Also disclosed is an embodiment of an exemplary passive circuit that can be used to implement the disclosed system and method embodiments.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EFH</sourceid><recordid>eNqNjEsKAjEQRGfjQtQ79AUGHGczrkVxr3tpko4GJh-6O8jc3kQ8gKuCevVq3dFtEaUAGC0E0ley4BLD2zPNJPLt7RIxeAM-KmOfOZlGAqEUpkBRIbkG6cmoZMF4NsUrZGSsn8Sy7VYOZ6HdLzcdXM7307UvkqsSVR7VbbGfDuNxGobxj8kHIgtA0w</recordid><startdate>20120807</startdate><enddate>20120807</enddate><creator>Anemikos, Theodoros E</creator><creator>Corson, Phillip L</creator><creator>Erturk, Mete</creator><creator>Hall, Ezra D. B</creator><creator>Perri, Anthony J</creator><creator>Ventrone, Sebastian T</creator><scope>EFH</scope></search><sort><creationdate>20120807</creationdate><title>System and method for wireless and dynamic intra-process measurement of integrated circuit parameters</title><author>Anemikos, Theodoros E ; Corson, Phillip L ; Erturk, Mete ; Hall, Ezra D. B ; Perri, Anthony J ; Ventrone, Sebastian T</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_grants_082398113</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2012</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Anemikos, Theodoros E</creatorcontrib><creatorcontrib>Corson, Phillip L</creatorcontrib><creatorcontrib>Erturk, Mete</creatorcontrib><creatorcontrib>Hall, Ezra D. B</creatorcontrib><creatorcontrib>Perri, Anthony J</creatorcontrib><creatorcontrib>Ventrone, Sebastian T</creatorcontrib><creatorcontrib>International Business Machines Corporation</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Anemikos, Theodoros E</au><au>Corson, Phillip L</au><au>Erturk, Mete</au><au>Hall, Ezra D. B</au><au>Perri, Anthony J</au><au>Ventrone, Sebastian T</au><aucorp>International Business Machines Corporation</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>System and method for wireless and dynamic intra-process measurement of integrated circuit parameters</title><date>2012-08-07</date><risdate>2012</risdate><abstract>Disclosed are embodiments of a system and a method that allow for wireless and dynamic intra-process (i.e., during and/or between process steps) measurements of integrated circuit parameters. The embodiments incorporate the use of a passive circuit, such as an inductor-capacitor-resistor (LCR) circuit resonator, that has a predetermined sensitivity to process variations in one or more physical or electrical integrated circuit parameters. The passive circuit can be wirelessly interrogated between and/or process steps. Then, the actual behavior exhibited by the passive circuit in response to the interrogation is compared to the expected behavior of an optimal circuit in the absence of process variations in order to determine the one or more parameters. Also disclosed is an embodiment of an exemplary passive circuit that can be used to implement the disclosed system and method embodiments.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_uspatents_grants_08239811
source USPTO Issued Patents
title System and method for wireless and dynamic intra-process measurement of integrated circuit parameters
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-16T16%3A38%3A10IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFH&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Anemikos,%20Theodoros%20E&rft.aucorp=International%20Business%20Machines%20Corporation&rft.date=2012-08-07&rft_id=info:doi/&rft_dat=%3Cuspatents_EFH%3E08239811%3C/uspatents_EFH%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true