Semiconductor device and method of fabricating a semiconductor device

A method is proposed for the fabrication of the gate electrode of a semiconductor device such that the effects of gate depletion are minimized. The method is comprised of a dual deposition process wherein the first step is a very thin layer that is doped very heavily by ion implantation. The second...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Krull, Wade A, Jacobson, Dale C
Format: Patent
Sprache:eng
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