Dual-damascene process to fabricate thick wire structure

Dual-damascene process to fabricate thick wire structure

A method and semiconductor device. In the method, at least one partial via is etched in a stacked structure and a border is formed about the at least one partial via. The method further includes performing thick wiring using selective etching while continuing via etching to at least one etch stop la...

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Hauptverfasser: Coolbaugh, Douglas D, Downes, Keith E, Lindgren, Peter J, Stamper, Anthony K
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Sprache:eng
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creator Coolbaugh, Douglas D
Downes, Keith E
Lindgren, Peter J
Stamper, Anthony K
description A method and semiconductor device. In the method, at least one partial via is etched in a stacked structure and a border is formed about the at least one partial via. The method further includes performing thick wiring using selective etching while continuing via etching to at least one etch stop layer.
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title Dual-damascene process to fabricate thick wire structure
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