Electron beam irradiating apparatus with monitoring device

The electron beam irradiating apparatus with the monitoring device has an electron beam irradiating means for irradiating materials in an irradiation chamber. The monitoring device has a photographing means for imaging a lights emitted by irradiating an electron beam to the materials; a storage mean...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hikosaka, Tomoyuki, Eguchi, Shiro, Suzuki, Takayuki, Harada, Nobuyasu, Gohzaki, Satoru, Sato, Shigekatsu, Hashimoto, Isao
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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