EUV pod with fastening structure

EUV pod with fastening structure

An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of re...

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Hauptverfasser: Ku, Chen-Wei, Lu, Pao-Yi, Lin, Chin-Ming, Sheng, Jain-Ping
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Sprache:eng
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creator Ku, Chen-Wei
Lu, Pao-Yi
Lin, Chin-Ming
Sheng, Jain-Ping
description An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.
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title EUV pod with fastening structure
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