Wet surface treatment by usage of a liquid bath containing energy limited bubbles

A method controllably and sustainably creates an upwardly directed gradient of dropping temperatures in a wet treatment tank between a cooled and face down workpiece (e.g., an in-process semiconductor wafer) and a lower down heat source. A thermal fluid upwell containing thermally collapsible bubble...

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Bibliographische Detailangaben

1. Verfasser:	Gotkis, Yehiel
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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