Flexible electrostatic actuator

An electrostatic actuator having a base including a first electrode and a flexible membrane including at least two material layers of different materials in contact with each other. At least one of the material layers includes a second electrode electrically isolated from the first electrode. The fl...

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Bibliographische Detailangaben

Hauptverfasser:	Dausch, David E, Goodwin, Scott H
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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