Method and system for providing a pole for a perpendicular magnetic recording head using a multi-layer hard mask

A method and system for providing a PMR pole in a transducer including an intermediate layer are disclosed. A mask including line(s) having side(s) is provided. A hard mask is provided on the mask. Portions of the hard mask reside on the line side(s) and intermediate layer surface. The hard mask inc...

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Hauptverfasser:	Zhang, Jinqiu, Hong, Liubo
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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