Sputtering apparatus and method of manufacturing solar battery and image display device by using the same

a b ab ab a b A sputtering apparatus of a continuous system that a first target and a second target are arranged to obliquely face a substrate and other targets to form a film while conveying the substrate along a conveying path , wherein shields facing the conveying direction of at least the substr...

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1. Verfasser:	Aonuma, Daisuke
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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