Sputtering apparatus and method of manufacturing solar battery and image display device by using the same

Sputtering apparatus and method of manufacturing solar battery and image display device by using the same

a b ab ab a b A sputtering apparatus of a continuous system that a first target and a second target are arranged to obliquely face a substrate and other targets to form a film while conveying the substrate along a conveying path , wherein shields facing the conveying direction of at least the substr...

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1. Verfasser: Aonuma, Daisuke
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creator Aonuma, Daisuke
description a b ab ab a b A sputtering apparatus of a continuous system that a first target and a second target are arranged to obliquely face a substrate and other targets to form a film while conveying the substrate along a conveying path , wherein shields facing the conveying direction of at least the substrate are provided between the conveying path and the first and second targets to have therebetween an extended region toward the conveying path in the space between the first target and the second target to enable to obtain a high quality film and to enable to prevent particles from diffusing in a chamber
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title Sputtering apparatus and method of manufacturing solar battery and image display device by using the same
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