Illumination system coherence remover with two sets of stepped mirrors

Illumination system coherence remover with two sets of stepped mirrors

A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the inp...

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Hauptverfasser: Visser, Huibert, Klinkhamer, Jacob Fredrik Friso, Ryzhikov, Lev, Coston, Scott D, Joobeur, Adel, Vink, Rob, Shmarev, Yevgeniy
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Sprache:eng
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creator Visser, Huibert
Klinkhamer, Jacob Fredrik Friso
Ryzhikov, Lev
Coston, Scott D
Joobeur, Adel
Vink, Rob
Shmarev, Yevgeniy
description A coherence remover is provided. In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.
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In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. 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In an embodiment the coherence remover includes a first mirror and a second mirror coupled to the first mirror. The coherence remover is configured to receive an input beam. Each of the first and second mirrors is configured to reflect a respective portion of the input beam to produce respective one or more intermediate beams. The intermediate beams collectively form an output beam that has a reduced coherence compared to the input beam.</abstract><oa>free_for_read</oa></addata></record>
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title Illumination system coherence remover with two sets of stepped mirrors
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