Flow sensors having nanoscale coating for corrosion resistance

A corrosion resistant flow sensor apparatus includes a flow sensor including a micromachinable substrate mounted on a package substrate that includes electrically conductive traces and substrate bond pads. The flow sensor includes a MEMS sensing structure for sensing a mass flow parameter and sensor...

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Bibliographische Detailangaben

Hauptverfasser:	Beck, Scott E, Bey, Paul P, Speldrich, Jamie, Javvad Qasimi, Mohammed A
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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