Anti-reflection plate and method for manufacturing anti-reflection structure thereof

A method for manufacturing an anti-reflection structure is provided. The method includes the following steps: First, a to-be-treated object is provided in a reactive area. Next, a plasma source is provided in the reactive area. Then, the plasma source is ionized to form plasma in atmospheric pressur...

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Bibliographische Detailangaben

Hauptverfasser:	Chen, Chih-Wei, Wu, Chin-Jyi, Hsieh, Wen-Tzong, Hsu, Wen-Tung, Lin, Chun-Hung
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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