Method of drying an object and apparatus for performing the same

Method of drying an object and apparatus for performing the same

In a method of drying an object, a first drying fluid and a second dry fluid may be first heated to form a gas mixture. The gas mixture may be second heated to prevent the mixed gas from condensing. The second heated gas mixture may be filtered to remove impurities from the second heated mixed gas....

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Hauptverfasser: Kim, Kuen-Byul, Kim, In-Gi, Park, Dae-Bum, Ryu, Soung-Kil, Baek, Seung-Bu, Kim, Seo-Hyun
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Sprache:eng
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creator Kim, Kuen-Byul
Kim, In-Gi
Park, Dae-Bum
Ryu, Soung-Kil
Baek, Seung-Bu
Kim, Seo-Hyun
description In a method of drying an object, a first drying fluid and a second dry fluid may be first heated to form a gas mixture. The gas mixture may be second heated to prevent the mixed gas from condensing. The second heated gas mixture may be filtered to remove impurities from the second heated mixed gas. The filtered mixed gas may be then applied to the object so as to dry the object.
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title Method of drying an object and apparatus for performing the same
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