Heat shield plate for substrate annealing apparatus

A heat shield plate for a substrate annealing apparatus is provided with a horizontally supported flat-plate-like substrate , a heater positioned above the substrate to heat the upper surface of the substrate with radiation heat, and a heat shield plate horizontally movable between a shielding posit...

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Bibliographische Detailangaben

Hauptverfasser:	Ishihara, Terumasa, Hashimoto, Takaharu, Mizuno, Masayuki, Morita, Masaru
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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