Method of manufacturing ball grid array type semiconductor device

A BGA type semiconductor device having high reliability is offered. A pad electrode is formed on a surface of a semiconductor substrate and a glass substrate is bonded to the surface of the semiconductor substrate. A via hole is formed from a back surface of the semiconductor substrate to reach a su...

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Bibliographische Detailangaben
1. Verfasser: Takao, Yukihiro
Format: Patent
Sprache:eng
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