Oxygen partial pressure control apparatuses and methods of using solid electrolytes for oxygen partial pressure control

−30 The present invention provides oxygen partial pressure control apparatuses that can control the partial pressure of oxygen in atmospheric gases in processing apparatuses or the like to within the range of 0.2 to 10atm, while maintaining low material and operational cost conditions. The present i...

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Bibliographische Detailangaben

Hauptverfasser:	Shirakawa, Naoki, Ikeda, Shinichi, Uchida, Katsuhide
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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