By-product collecting processes for cleaning processes

An apparatus and a method for operating the same. The method includes providing an apparatus which includes a chamber, wherein the chamber includes first and second inlets, an anode and a cathode structures in the chamber, and a wafer on the cathode structure. A cleaning gas is injected into the cha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Cooney, III, Edward Crandal, Murphy, William Joseph, Stamper, Anthony Kendall, Strippe, David Craig
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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