Method of manufacturing a trench transistor having a heavy body region

A trenched field effect transistor is provided that includes (a) a semiconductor substrate, (b) a trench extending a predetermined depth into the semiconductor substrate, (c) a pair of doped source junctions, positioned on opposite sides of the trench, (d) a doped heavy body positioned adjacent each...

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Bibliographische Detailangaben
Hauptverfasser: Mo, Brian S, Chau, Duc, Sapp, Steven, Bencuya, Izak, Probst, Dean E
Format: Patent
Sprache:eng
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