Lithographic apparatus, radiation system and device manufacturing method

A foil trap is located in a path of a radiation beam. The foil trap includes an array of conductive strips. A voltage application circuit is coupled to the strips to apply voltage differences between pairs of adjacent ones of the strips. The voltage application circuit includes a current limiting ci...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Gayazov, Robert Rafilevitch, Banine, Vadim Yevgenyevich, Ivanov, Vladimir Vitalevitch, Korob, Evgenii Dmitreevitch, Koshelev, Konstantin Nikolaevitch, Zukavishvili, Givi Georgievitch, Sidelnikov, Yurii Victorovitch
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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