Nanoimprint resin stamper

A resin stamper is provided that is intended for use in an optical transfer-based nanostructure transfer apparatus and which is capable of automatic transport and alignment. The resin stamper includes a support member made of a light transmitting material and having mechanical strength, an intermedi...

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Bibliographische Detailangaben

Hauptverfasser:	Komoriya, Susumu, Mori, Kyoichi, Shizawa, Noritake, Yamasaki, Takanori, Hatogai, Tetsuhiro, Tsushima, Koji
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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