System for processing an object

System for processing an object

A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or depositio...

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Hauptverfasser: Buhler, Wolfram, Rosenthal, Alexander, Stebler, Camille, Bertagnolli, Emmerich, Wanzenbock, Heinz
Format: Patent
Sprache:eng
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creator Buhler, Wolfram
Rosenthal, Alexander
Stebler, Camille
Bertagnolli, Emmerich
Wanzenbock, Heinz
description A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.
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title System for processing an object
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