Direct nanoscale patterning of metals using polymer electrolytes

Disclosed herein are electrochemical fabrication platforms for making structures, arrays of structures and functional devices having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations. Methods, systems and system components use an electrochemical stamping tool...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Fang, Nicholas X, Ferreira, Placid M, Hsu, Keng Hao, Schultz, Peter Lee, Jacobs, Kyle E, Kumar, Anil
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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