Structure for making a top-side contact to a substrate

A semiconductor structure includes a starting semiconductor substrate having a recessed portion. A semiconductor material is formed in the recessed portion, and has a higher resistivity than the starting semiconductor substrate. A body region extends in the semiconductor material, and has a conducti...

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Bibliographische Detailangaben

Hauptverfasser:	Wu, Chun-Tai, Ho, Ihsiu
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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