Substrate processing chamber with dielectric barrier discharge lamp assembly

A thermal processing chamber with a dielectric barrier discharge (DBD) lamp assembly and a method for using the same are provided. In one embodiment, a thermal processing chamber includes a chamber body and a dielectric barrier discharge lamp assembly. The dielectric barrier discharge lamp assembly...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ranish, Joseph Michael, Singh, Kaushal Kishore, Adams, Bruce
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!