Thin film resistors integrated at two different metal single die

An integrated circuit includes a first thin film resistor on a first dielectric layer. A first layer of interconnect conductors on the first dielectric layer includes a first and second interconnect conductors electrically contacting the first thin film resistor. A second dielectric layer is formed...

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Bibliographische Detailangaben

Hauptverfasser:	Beach, Eric W, Drobny, Vladimir F, Robinson, Derek W
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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