Processes for purification of silicon tetrafluoride
Processes for purifying silicon tetrafluoride source gas by subjecting the source gas to one or more purification processes including: contacting the silicon tetrafluoride source gas with an ion exchange resin to remove acidic contaminants, contacting the silicon tetrafluoride source gas with a cata...
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| Format: | Patent |
| Sprache: | eng |
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