Sacrificial compositions and methods of fabricating a structure using sacrificial compositions

Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.

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Hauptverfasser:	Kohl, Paul A, Joseph, Paul J, Reed, Hollie K, Bidstrup-Allen, Sue Ann, White, Celesta E, Henderson, Clifford
Format:	Patent
Sprache:	eng
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creator	Kohl, Paul A Joseph, Paul J Reed, Hollie K Bidstrup-Allen, Sue Ann White, Celesta E Henderson, Clifford
description	Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.
format	Patent
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title	Sacrificial compositions and methods of fabricating a structure using sacrificial compositions
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