Plasma generating electrode and plasma reactor

A plasma generating electrode includes two types of plate-shaped unit electrodes of different polarities, the two types of unit electrodes of different polarities being hierarchically and alternately stacked at specific intervals, a discharge space for generating plasma being formed between the oppo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Fujioka, Yasumasa, Kondo, Atsuo, Masuda, Masaaki, Dosaka, Kenji, Miki, Masanobu
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!