Semiconductor device and method of manufacturing the same

On an SOI substrate, a hydrogen ion implantation section in which distribution of hydrogen ions peaks in a BOX layer (buried oxide film layer), and a single-crystal silicon thin-film transistor are formed. Then this SOI substrate is bonded with an insulating substrate. Subsequently, the SOI substrat...

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Bibliographische Detailangaben
Hauptverfasser: Takafuji, Yutaka, Itoga, Takashi
Format: Patent
Sprache:eng
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