Structure inspection method, pattern formation method, process condition determination method and resist pattern evaluation apparatus

Wavelength dispersion of intensity of light reflected from an evaluation object is measured. A complex refractive index of a substance forming the evaluation object and the environment are prepared. Virtual component ratios comprising a mixture ratio of the substances forming the evaluation object a...

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Hauptverfasser:	Hayasaki, Kei, Mikami, Toru, Ito, Shinichi, Yamazaki, Yuichiro, Kotani, Toshiya
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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