Fabrication process and package design for use in a micro-machined seismometer or other device
An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures...
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| Format: | Patent |
| Sprache: | eng |
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