Active spectral control of DUV light source

Active spectral control of DUV light source

According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a...

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Hauptverfasser: Dunstan, Wayne J, Jacques, Robert N, Rao, Rajasekhar M, Trintchouk, Fedor B
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creator Dunstan, Wayne J
Jacques, Robert N
Rao, Rajasekhar M
Trintchouk, Fedor B
description According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output flight pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.
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fullrecord <record><control><sourceid>uspatents_EFH</sourceid><recordid>TN_cdi_uspatents_grants_07852889</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>07852889</sourcerecordid><originalsourceid>FETCH-uspatents_grants_078528893</originalsourceid><addsrcrecordid>eNrjZNB2TC7JLEtVKC5ITS4pSsxRSM7PKynKz1HIT1NwCQ1TyMlMzyhRKM4vLUpO5WFgTUvMKU7lhdLcDApuriHOHrqlxQWJJal5JcXx6UWJIMrA3MLUyMLC0pgIJQAU1SoG</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Active spectral control of DUV light source</title><source>USPTO Issued Patents</source><creator>Dunstan, Wayne J ; Jacques, Robert N ; Rao, Rajasekhar M ; Trintchouk, Fedor B</creator><creatorcontrib>Dunstan, Wayne J ; Jacques, Robert N ; Rao, Rajasekhar M ; Trintchouk, Fedor B ; Cymer, Inc</creatorcontrib><description>According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output flight pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.</description><language>eng</language><creationdate>2010</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7852889$$EPDF$$P50$$Guspatents$$Hfree_for_read</linktopdf><link.rule.ids>230,308,780,802,885,64039</link.rule.ids><linktorsrc>$$Uhttps://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/7852889$$EView_record_in_USPTO$$FView_record_in_$$GUSPTO$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Dunstan, Wayne J</creatorcontrib><creatorcontrib>Jacques, Robert N</creatorcontrib><creatorcontrib>Rao, Rajasekhar M</creatorcontrib><creatorcontrib>Trintchouk, Fedor B</creatorcontrib><creatorcontrib>Cymer, Inc</creatorcontrib><title>Active spectral control of DUV light source</title><description>According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output flight pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2010</creationdate><recordtype>patent</recordtype><sourceid>EFH</sourceid><recordid>eNrjZNB2TC7JLEtVKC5ITS4pSsxRSM7PKynKz1HIT1NwCQ1TyMlMzyhRKM4vLUpO5WFgTUvMKU7lhdLcDApuriHOHrqlxQWJJal5JcXx6UWJIMrA3MLUyMLC0pgIJQAU1SoG</recordid><startdate>20101214</startdate><enddate>20101214</enddate><creator>Dunstan, Wayne J</creator><creator>Jacques, Robert N</creator><creator>Rao, Rajasekhar M</creator><creator>Trintchouk, Fedor B</creator><scope>EFH</scope></search><sort><creationdate>20101214</creationdate><title>Active spectral control of DUV light source</title><author>Dunstan, Wayne J ; Jacques, Robert N ; Rao, Rajasekhar M ; Trintchouk, Fedor B</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-uspatents_grants_078528893</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2010</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Dunstan, Wayne J</creatorcontrib><creatorcontrib>Jacques, Robert N</creatorcontrib><creatorcontrib>Rao, Rajasekhar M</creatorcontrib><creatorcontrib>Trintchouk, Fedor B</creatorcontrib><creatorcontrib>Cymer, Inc</creatorcontrib><collection>USPTO Issued Patents</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Dunstan, Wayne J</au><au>Jacques, Robert N</au><au>Rao, Rajasekhar M</au><au>Trintchouk, Fedor B</au><aucorp>Cymer, Inc</aucorp><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Active spectral control of DUV light source</title><date>2010-12-14</date><risdate>2010</risdate><abstract>According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output flight pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.</abstract><oa>free_for_read</oa></addata></record>
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title Active spectral control of DUV light source
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T22%3A06%3A37IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-uspatents_EFH&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Dunstan,%20Wayne%20J&rft.aucorp=Cymer,%20Inc&rft.date=2010-12-14&rft_id=info:doi/&rft_dat=%3Cuspatents_EFH%3E07852889%3C/uspatents_EFH%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true