Drainage apparatus for a singulation system

A singulation system for a workpiece has a carrier for mounting the workpiece during singulation and a receptacle for collecting debris formed. A driving mechanism, which is operative to move the carrier and the workpiece, is at least partially covered by a bellows. A bellows protecting cover extend...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Cheng, Chi Wah, Chow, Lap Kei Eric, Leung, Chi Hang
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!