Strained-channel fin field effect transistor (FET) with a uniform channel thickness and separate gates

A semiconductor device (and method for making the same) includes a strained-silicon channel formed adjacent a source and a drain, a first gate formed over a first side of the channel, a second gate formed over a second side of the channel, a first gate dielectric formed between the first gate and th...

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Bibliographische Detailangaben
1. Verfasser: Cohen, Guy Moshe
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device (and method for making the same) includes a strained-silicon channel formed adjacent a source and a drain, a first gate formed over a first side of the channel, a second gate formed over a second side of the channel, a first gate dielectric formed between the first gate and the strained-silicon channel, and a second gate dielectric formed between the second gate and the strained-silicon channel. The strained-silicon channel is non-planar.