Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate

An apparatus and method incorporating at least two sensors that detect the presence of a substrate is provided. In one embodiment, a method for transferring a substrate in a processing system is described. The method includes positioning a substrate on an end effector in a first chamber, moving the...

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Hauptverfasser:	Bagley, William A, Lee, Paohuei, Kim, Kyung-Tae, Kim, Sam-Kyung, Kiyotake, Toshio, Kim, Sam, Matsumoto, Takayuki, Larson, Jonathan Erik, Inagawa, Makoto, Hoffman, James, Leung, Billy C
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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